Quality Factor of Free In-plane Vibration of a Fully Clamped Rectangular Micro-plate

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چکیده مقاله:

Thermo-elastic damping is a significant dissipation mechanism in high quality factor microstructures. In this paper, thermo-elastic damping of the in-plane vibration of fully clamped rectangular micro-plates has been studied. The governing equation of the micro-plate motion and heat conduction equation were derived. Then, The Galerkin method has been used to solve the coupled heat-displacement equations. Eventually, considering the micro-plate of various materials, the effects of geometrical parameters including the length and width of micro-plate and also ambient temperature on the thermo-elastic damping quality factor have been investigated.

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عنوان ژورنال

دوره 31  شماره 1

صفحات  96- 103

تاریخ انتشار 2018-01-01

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